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Study of the possibility of reducing the angular errors of circular optical scales fabricated by lift-off photolithography

机译：减小通过剥离光刻法制造的圆形光学尺的角度误差的可能性的研究

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This paper discusses the possibilities of reducing the angular errors of circular optical scales fabricated by lift-off photolithography, using photomasks synthesized by means of a CLWS-300 laser image generator. © 2013 Optical Society of America.

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Kruchinin, D. Yu.;
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年度 2013
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1. Study of the possibility of reducing the angular errors of circular optical scales fabricated by lift-off photolithography [J] . Kruchinin D.Yu. Journal of optical technology . 2013 ,第8期

机译：减小通过剥离光刻法制造的圆形光学尺的角度误差的可能性的研究
2. A study of the effect of the use of immersion fluid on the angular errors in dials fabricated by lift-off photolithography [J] . Kruchinin D. Yu., Farafontova E. P. Journal of optical technology . 2016 ,第1期

机译：关于使用浸没液对剥离式光刻制造的刻度盘的角度误差的影响的研究
3. Study of how the angles of incidence of the rays of actinic radiation on the surface of a photomask affect the angular errors of dials fabricated by lift-off photolithography [J] . D. Yu. Kruchinin Journal of Optical Technology . 2010 ,第6期

机译：关于光掩模表面上的光化辐射线的入射角如何影响通过剥离光刻法制造的刻度盘的角度误差的研究
4. Study on possibilities for reducing the measurement error of CNNS [C] . Yong Jiang, Bufeng Li, Youxiang Cui MIC;International Conference on Measurement, Information and Control . 2012

机译：减少CNNS测量误差的可能性的研究
5. Reducing errors in simulated satellite views of clouds from large-scale models. [D] . Hillman, Benjamin R. 2016

机译：减少大型模型在模拟卫星云视图中的误差。
6. Toward Nanometer-Scale Optical Photolithography: Utilizing the Near-Field of Bowtie Optical Nanoantennas [O] . Arvind Sundaramurthy, Gordon S. Kino, P. James Schuck, -1

机译：走向纳米级光学光刻：利用领结光学纳米天线的近场。
7. Study of how the synthesis conditions of circular optical scales fabricated using a CLWS-300 laser image generator affect their angular errors [O] . Kruchinin, D. U., Yakovlev, O. B., Andronov, M. P. 2012

机译：研究使用CLWS-300激光图像生成器制造的圆形光学尺的合成条件如何影响其角度误差
8. Study of Possibility to Implement the Dynamic Nonlinear-Optical Corrector Basedon the Use of the Optical Negative-Feedback Loop for Correction for Distortions of Large Scale Optics [R] . Venediktov, V. Y. 1997

机译：基于光学负反馈环校正大尺度光学畸变的动态非线性光学校正器的可行性研究

Study of the possibility of reducing the angular errors of circular optical scales fabricated by lift-off photolithography

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